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Gridded RF Ion Sources

Veeco's gridded RF ion sources are designed for improved production of long-run ion beam deposition processes.

Gridded RF Ion Sources

Veeco's gridded RF ion sources are designed for improved production of long-run ion beam deposition processes.

NOVUS RF Ion Source Controller

Get stable power for ion source operation with Veeco’s NOVUS RF lon Source Controller, featuring a state-of-the-art precision control…
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6cm x 22cm RF Ion Source

Designed for highly productive in-line systems with substrates, Veeco’s 6 x 22cm gridded linear RF ion source is ideal…
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6cm x 66cm RF Ion Source

Ideal for uniform processing of large-scale substrates, Veeco’s 6 x 66cm RF linear ion source provides low-maintenance, filamentless operation…
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16cm High Power RF Ion Source

Ideal for for use in reactive processes, Veeco’s 16cm RF HP ion source offers beam uniformity of
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16cm RF Ion Source

Get a broad uniform ion beam source for reactive processes such as ion beam assist or ion beam deposition…
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12cm RF Ion Source

Improve the performance and quality of long uninterrupted reactive processes such as ion beam assist or ion beam deposition…
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