Chemists have synthesized many exciting new precursors for ALD and have created a large number of atomic layer deposition materials, such as coatings with improved properties for metals, semiconductors, insulators, oxides, nitrides, dielectrics, magnetic, and refractive coatings.
Our team of technical experts will be happy to work with you to find materials that work for your application.
| OXIDES | NITRIDES | SULFIDES | METALS / TELLURIDES | |||||
|---|---|---|---|---|---|---|---|---|
| AI2O3 | Fe2O3 | Li3PO4 | NiFe2O4 | V2O5 | AlGaN | MnN | CdS | Co |
| Al:HfO2 | Fe3O4 | LiPON | NiO | WO3 | AlN | NbN | CoS | Cu |
| Al:ZnO | FePO4 | LiFePO4 | NiO | Y2O3 | BxGa1-xN | NbTiN | Cu2S | Fe |
| AlGaN | Ga2O3 | Li2MnO4 | PO4 | YSZ | BxIn1-xN | SiN | Cu2ZnSnS4 | Mn |
| BOx | HfO2 | Li5TaOz | SiO2 | ZnAl2O4 | CoN | TaN | In2S3 | Ni |
| BiFeO3 | HfSiON | MgO | SnO2 | ZnO | Hf3N4 | TiN | MnS | Pd |
| CeO2 | In2O3 | MnO2 | SrO | ZnMgO | InAlN | WN | PbS | Pt |
| Co3O4 | ITO | MoO3 | SrTiO3 | ZnOS | InGaN | ZrN | Sb2S3 | Ru |
| CoFe2O4 | La2O3 | NaTiO | Ta2O5 | ZrO2 | InN | SnS | Bi2Te3 | |
| Er2O3 | Li2O | Nb2O5 | TiO2 | ZnS | Sb2Te3 | |||