Chemists have synthesized many exciting new precursors for ALD and have created a large number of atomic layer deposition materials, such as coatings with improved properties for metals, semiconductors, insulators, oxides, nitrides, dielectrics, magnetic, and refractive coatings.
ALD materials and precursors are available through our partners, Strem Chemicals and Sigma-Aldrich. For materials not listed please use our search page or contact us at ALDinfo@veeco.com.Our team of technical experts will be happy to work with you to find materials that work for your application.
| OXIDES | NITRIDES | SULFIDES | METALS / TELLURIDES | |||||
|---|---|---|---|---|---|---|---|---|
| AI2O3 | Fe2O3 | Li3PO4 | NiFe2O4 | V2O5 | AlGaN | MnN | CdS | Co |
| Al:HfO2 | Fe3O4 | LiPON | NiO | WO3 | AlN | NbN | CoS | Cu |
| Al:ZnO | FePO4 | LiFePO4 | NiO | Y2O3 | BxGa1-xN | NbTiN | Cu2S | Fe |
| AlGaN | Ga2O3 | Li2MnO4 | PO4 | YSZ | BxIn1-xN | SiN | Cu2ZnSnS4 | Mn |
| BOx | HfO2 | Li5TaOz | SiO2 | ZnAl2O4 | CoN | TaN | In2S3 | Ni |
| BiFeO3 | HfSiON | MgO | SnO2 | ZnO | Hf3N4 | TiN | MnS | Pd |
| CeO2 | In2O3 | MnO2 | SrO | ZnMgO | InAlN | WN | PbS | Pt |
| Co3O4 | ITO | MoO3 | SrTiO3 | ZnOS | InGaN | ZrN | Sb2S3 | Ru |
| CoFe2O4 | La2O3 | NaTiO | Ta2O5 | ZrO2 | InN | SnS | Bi2Te3 | |
| Er2O3 | Li2O | Nb2O5 | TiO2 | ZnS | Sb2Te3 | |||