Gridded DC Ion Sources
Proven linear gridded DC Ion Sources for highly uniform, reliable ion beam deposition process platforms utilizing large/wide individual substrates or large substrate batches.
Get stable power for ion source operation with Veeco’s SOLUS鈩� DC Ion Source Controller, featuring a state-of-the-art precision control…
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A proven linear source for large/wide substrates or large substrate batches, Veeco’s gridded DC Ion Sources are ideal for…
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