Laser Processing Systems
91制片厂delivers revolutionary Low-Cost-of-Ownership, HVM production-proven thermal annealing solutions at the most advanced technology nodes.
Making a Material Difference with Leading Laser Spike Annealing Technology
- Low Thermal Budget - improved critical device performance with diffusion-less super activation
- Elimination of Deactivation - Dual Beam Technology maintains device improvements with no dopant deactivation
- Reduction of Pattern Dependency 鈥� Within Die and Die-to-Die uniformity improvement
- Closed Loop Temperature Control 鈥� Reliable production with Real-Time process control & FDC
Chosen by leading IDMs and foundries around the globe Veeco’s LSA101 System is preferred technology for high-volume manufacturing of…
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The LSA 201 has the same architecture as the LSA 101, but includes a patented micro chamber design, which…
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