TurboDisc EPIK 868 MOCVD System for LED Production
Leading-Edge Performance with Maximum Capital Efficiency & Footprint Savings
Veeco鈥檚 EPIK庐 868 is the LED industry鈥檚 highest performance MOCVD system that enables superior uniformity and repeatability with low defectivity. Available in a four-reactor configurations, EPIK 868 features breakthrough technologies including the proprietary IsoFlange鈩� and TruHeat鈩� technologies that provide laminar flow and uniform temperature profile across the entire wafer carrier. These technological innovations drive higher yields required for mini and micro LEDs. Inherent in EPIK 868 is the TurboDisc庐 technology which enables highest system availability and uptime. Designed for mass production, EPIK 868 high capacity carrier accommodates multiple 4鈥� or 6鈥� wafer sizes for the lowest cost of ownership. Customers can easily transfer processes from existing TurboDisc systems to the new EPIK 868 MOCVD platform for quick-start production of high quality mini and micro LEDs.
- Excellent uniformity with low defectivity
- Compact cluster architecture
- High throughput architecture for maximum production