GEN200 MBE System
Most Cost-Effective and Highest-Capacity Multi-4″ Production MBE System in the Market
Veeco’s GEN200庐 MBE system is the most cost-effective and highest-capacity multi-4″ production MBE system in the market today. The system delivers superior throughput, long campaigns and excellent wafer quality in growing GaAs- or InP-based wafers for such devices as pump lasers, VCSELs and HBTs.
- Delivers the lowest-cost 4 x 4″ epiwafer growth
- Modular architecture allows significantly smaller footprint than comparable MBE systems
- Allows for up to two growth modules, increasing throughput or allowing processing of incompatible materials
- Optional bulkhead installation optimizes cleanroom space
- Incorporates the industry’s most innovative, reliable system hardware, sources and components