GEN20 MBE System
Ultra-Flexible Tool with a Design Configurable for III-V and Emerging Materials
Veeco’s GEN20鈩� MBE system is an ultra-flexible tool with a design configurable for III-V and emerging materials, including applications that require the integration of e-beam technology. The system incorporates production design technology that allows for an optional cluster tool wafer transfer system for an ideal lab-to-fab migration.
- Ideal for materials research and pre-production environments
- Vertical source to substrate orientation with 12 MBE source ports and the option to add e-beam capabilities
- Manual or automated wafer transfer options
- Configurable cryopanel, manipulator, shutters and in-situ monitoring equipment
- Modular design allows up to two growth modules