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The GEN10â„¢ MBE System is the most economical, flexible cluster tool system in a proven platform, allowing for up to three configurable, material-specific growth modules. This enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations. This, combined with 91ÖÆƬ³§components technology, are key factors in why the MBE community is choosing the GEN10â„¢ MBE System, no matter what the application.

• Automated wafer transfer enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations
• Economical upgrade path to additional growth modules, maximum of three
• Configurable, material-specific growth modules in a cluster architecture enable growth of incompatible materials in one vacuum system
• Direct process path to larger production MBE systems