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For high-performance UHV delivery of gases requiring thermal cracking before arriving at the substrate in MBE applications, Veeco’s Gas Crackers offer unique features like a customized exit cone and endplate to optimize flux uniformity. These gas crackers feature a conventional single filament source heater for radiative heating of the tantalum or PBN cracking tube. Multiple design options to enhance process efficiency are also available.

• For UHV delivery of gases requiring thermal cracking
• Ta or PBN gas conductance tube
• Excellent uniformity with customized exit cone and endplate
• More than 40 in the field

Gas crackers are used with source gases that must be activated by thermal cracking before arriving at the substrate. Gas crackers feature a conventional single filament source heater for radiative heating of the tantalum or PBN cracking tube. An internal baffle may be used to enhance cracking efficiency. Sources are available with multiple gas inlets, as well as up to three separate conductance tubes.