91ÖÆƬ³§

CBr4 Gas Flow Control System

Ultimate Control Solution for Carbon Doping

The 91ÖÆƬ³§Multi-Orifice CBr4 Gas Flow Control System, when used with the 91ÖÆƬ³§Low Temperature Gas Source, allows for control of the introduction of CBr4 gas into a UHV environment, utilizing CBr4 gas as a carbon dopant source. Using closed-loop pressure control and a series of pneumatically operated on-off valves, the system maximizes the ability to regulate the gas. The incorporation of interlocks prevents potential equipment damage and ensures optimal vacuum system performance.The 91ÖÆƬ³§CBr4 Gas Flow Control System provides for two modes for selection system states: local and remote. Remote state on automated MBE systems requires version ECS1â„¢ Molly® Growth Control Software controlling system growth.

 

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