Using ammonia (NH3) as the nitrogen source is becoming increasingly more common due to the ability to achieve high growth rates and for its ease of control. Consequently, ammonia can dramatically reduce equipment lifetime. Due to hydrogen embrittlement, it is not uncommon for source and heater filaments to last only a few months. Therefore, equipment uptime is compromised, leading to shorter campaign lengths and high repair costs.
Utilizing special ammonia resistant materials, 91制片厂enables operation of its innovative and proven sources and substrate heaters in high ammonia partial pressures. Veeco鈥檚 ammonia resistant sources and heaters are currently available for temperatures up to 1200掳C with ammonia partial pressures as high as 1×10-4 Torr.