MBE Systems - Veeco /technologies-and-products/mbe-systems/ Fri, 05 Jun 2020 16:56:25 +0000 en-US hourly 1 https://wordpress.org/?v=6.5.3 https://veeco-media-file.s3.amazonaws.com/wp-content/uploads/2020/08/04073652/veeco-favicon.png MBE Systems - Veeco /technologies-and-products/mbe-systems/ 32 32 GEN20 MBE System /products/gen20-mbe-system/ Mon, 30 Mar 2020 05:13:53 +0000 http://miriveeco.com/?post_type=products&p=1026 The GEN20™ is a flexible MBE system with a design configurable for producing all compound semiconductor materials. A key benefit of the GEN20 system is its cluster tool wafer transfer system, which is ideal for lab-to-fab migration.

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]]> Ultra-Flexible Tool with a Design Configurable for III-V and Emerging Materials

Veeco’s GEN20™ MBE system is an ultra-flexible tool with a design configurable for III-V and emerging materials, including applications that require the integration of e-beam technology. The system incorporates production design technology that allows for an optional cluster tool wafer transfer system for an ideal lab-to-fab migration.

  • Ideal for materials research and pre-production environments
  • Vertical source to substrate orientation with 12 MBE source ports and the option to add e-beam capabilities
  • Manual or automated wafer transfer options
  • Configurable cryopanel, manipulator, shutters and in-situ monitoring equipment
  • Modular design allows up to two growth modules

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]]> GEN200 MBE System /products/gen200-mbe-system/ Mon, 30 Mar 2020 04:51:31 +0000 http://miriveeco.com/?post_type=products&p=1013 The most cost-effective and highest-capacity multi-wafer production MBE system in its class, Veeco's GEN200® MBE system delivers superior throughput and excellent wafer quality.

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]]> Most Cost-Effective and Highest-Capacity Multi-4″ Production MBE System in the Market

Veeco’s GEN200® MBE system is the most cost-effective and highest-capacity multi-4″ production MBE system in the market today. The system delivers superior throughput, long campaigns and excellent wafer quality in growing GaAs- or InP-based wafers for such devices as pump lasers, VCSELs and HBTs.

  • Delivers the lowest-cost 4 x 4″ epiwafer growth
  • Modular architecture allows significantly smaller footprint than comparable MBE systems
  • Allows for up to two growth modules, increasing throughput or allowing processing of incompatible materials
  • Optional bulkhead installation optimizes cleanroom space
  • Incorporates the industry’s most innovative, reliable system hardware, sources and components

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]]> GEN2000 MBE System /products/gen2000-mbe-system/ Mon, 30 Mar 2020 04:48:38 +0000 http://miriveeco.com/?post_type=products&p=996 The GEN2000® MBE system delivers unmatched throughput and cost of ownership for high volume production applications.

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]]> Superior Throughput, Longer Campaigns, Smaller Footprint and Cluster Tool Wafer Handling

The GEN2000® MBE system provides superior throughput, longer campaigns, smaller footprint and cluster tool wafer handling. It is the ideal choice for high-volume manufacturing of wireless telecommunications devices such as HBTs and pHEMTs, and emerging applications requiring multi-6″ production with low cost of ownership.

  • Delivers industry’s lowest cost per wafer
  • Superior design enables 40 percent to 60 percent smaller footprint than comparable MBE systems
  • Modular architecture allows for up to two growth modules, increasing throughput or allowing processing of incompatible materials
  • Easy maintenance maximizes uptime
  • Optional bulkhead installation optimizes cleanroom space
  • Incorporates the industry’s most innovative, reliable system hardware, sources and components

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]]> GEN10 MBE System /products/gen10-mbe-system/ Mon, 30 Mar 2020 04:40:02 +0000 http://miriveeco.com/?post_type=products&p=983 The 3” wafer GEN10™ system is built upon more than 20 years of cumulative automation transfer knowledge and derived from Veeco’s proven production MBE systems. 

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]]> Automated Wafer Transfer Enables High System Utilization

The GEN10™ MBE System is the most economical, flexible cluster tool system in a proven platform, allowing for up to three configurable, material-specific growth modules. This enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations. This, combined with 91Ƭcomponents technology, are key factors in why the MBE community is choosing the GEN10™ MBE System, no matter what the application.

  • Automated wafer transfer enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations
  • Economical upgrade path to additional growth modules, maximum of three
  • Configurable, material-specific growth modules in a cluster architecture enable growth of incompatible materials in one vacuum system
  • Direct process path to larger production MBE systems

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]]> GENxcel R&D MBE System /products/genxcel-rd-mbe-system/ Mon, 30 Mar 2020 04:34:06 +0000 http://miriveeco.com/?post_type=products&p=976 The award-winning GENxcel™ system is designed specifically for compound semiconductor R and D and pre-production markets. The flexible design provides the ability to produce high quality epitaxial layers on substrates up to 100mm in diameter for a variety of applications.

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]]> High quality epitaxial layers on substrates up to 4″ in diameter

The new, award-winning GENxcel™ system expands on the GENxplor™, the best-selling MBE system since its introduction in August 2013, with high-quality epitaxial growth on single 4” substrates compared to the 3” capabilities of the GENxplor system. The GENxcel system features an easy-to-use manual transfer system, 12 source ports and modern electronics fully integrated into a single frame design for maximum laboratory footprint efficiency.

  • High quality epitaxial layers on substrates up to 4″ in diameter
  • Unique, single frame architecture improves ease-of-use, provides convenient source access and enhanced serviceablility
  • Efficient, all-in-one design combines manual system with on-board electronics for 40 percent lab space savings compared to other MBE systems
  • Ideal for cutting-edge research on a wide variety of materials including GaAs, nitrides and oxides
  • Molly® software integrates easy recipe writing, automated growth control and always-on data recording
  • Optional Nova™ ultra high temperature substrate heater for proven performance at 1850°
  • Direct scalability to GEN20™, GEN200® and GEN2000® MBE systems

CS Industry Innovation Award - GENxcel MBE System

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]]> GENxplor R&D MBE System /products/genxplor-rd-mbe-system/ Mon, 30 Mar 2020 04:24:47 +0000 http://miriveeco.com/?post_type=products&p=970 The GENxplor® system is the market’s most advanced, high performance R&D system chosen by leading researchers to grow a variety of compound semiconductor materials on substrates up to 3” in diameter.

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]]> Industry’s most advanced, high performance R&D system chosen by leading researchers
GENXplor
The GENxplor® R&D MBE System, awared the CSindustry Award for compound semiconductor manufacturing, uses Veeco’s proven 3″ growth chamber design and features unmatched process flexibility – perfect for materials research on emerging technologies such as UV LEDs, high-efficiency solar cell and high-temperature superconductors. Its efficient, single frame design combines all vacuum hardware with on-board electronics to make it up to 40% smaller than other MBE systems, saving valuable lab space.  Because the manual system is integrated on a single frame, installation time is reduced.  The open architecture design on the GENxplor also improves ease-of-use, provides convenient access to effusion cells and allows easier serviceability when compared to other MBE systems.
  • High quality epitaxial layers on substrates up to 3″ in diameter
  • Extreme E-beam temperature heater (>1850°C)
  • Unique, single frame architecture improves ease-of-use, provides convenient source access and enhanced serviceablility
  • Efficient, all-in-one design combines manual system with on-board electronics for 40 percent lab space savings compared to other MBE systems
  • Ideal for cutting-edge research on a wide variety of materials including GaAs, nitrides and oxides
  • Molly® software integrates easy recipe writing, automated growth control and always-on data recording
  • Optional Nova™ ultra high temperature substrate heater for proven performance at 1850°
  • Direct scalability to GEN20™, GEN200® and GEN2000® MBE systems

CS Industry Innovation Award - GENxcel MBE System

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