Veeco’s SOLUS DC Ion Source Controller features a state-of-the-art precision control system design, providing reliable and stable power for ion source operation in all types of processes. Integrated power modules and gas flow control with ratio capabilities allow for optimal ion source control and performance in the most demanding process environments.

• Easy to use single button operation
• Manual, automated and remote operations options
• Cutting-edge control for improved plasma stability
• Integrated and configurable gas flow control
• Customizable control settings for tailored source operation
• Time-saving troubleshooting features
• Useful events and status logging screen

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Veeco’s proven linear gridded DC Ion Sources are ideal for highly uniform, reliable ion beam deposition process platforms utilizing large/wide individual substrates or large substrate batches. They are an excellent resource for either linear or cylindrical fixturing.

• Features the same innovative design, quality and reliability as Veeco’s world-class round ion beam sources
• Provides uniform plasma and high-current density
• Supports a wide beam energy range of 50 to 2000 eV with nominal beam currents per source up to 500 mA
• Power supply options allow beam currents up to 800 mA

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